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RTP Tube Furnace

  • FGL(RTP)-50/11/1

  • 1

  • 1500*710*500

  • 50mm

  • 1500mm

  • 320mm

  • 1000℃

  • 1100℃

  • 3.0

  • K

Availability:
Quantity:

Application

Slide-in tube furnace with integrated structure is designed for special process requirements of rapid heating and cooling up to 1100℃. Rapid cooling is achieved by moving the furnace body. It is also possible to pre-set the temperature and then move to the sample to achieve rapid temperature rise. It is suitable for the widely used RTP process and CVD graphene process.


Features

1. Use temperature RT ~ 1000 ℃;

2. Intelligent programmable temperature controller with precise control, which can edit, store and call multi-segment program;

3. furnace shell structure, double-layer shell air-cooled structure;

4. stainless steel double sealing flange seal;

5. adjustable flange support structure at both ends to extend the service life of the quartz tube;

6. LED high-strength, vandal-resistant, all stainless steel buttons, durable;

7. over-temperature protection function, when the temperature exceeds the allowable set value automatically power off;

8. safety protection when the furnace body leakage automatic power off;

9. K-type thermocouple, accurate temperature control

10. Heating element is ceramic fiber heating module, heating wire embedded structure structure


Additional Options

Vacuum system: (rotary vane mechanical pump, diffusion pump unit, molecular pump unit);

Atmosphere system: (float flow meter, mass flow meter);

Note: options need to be configured to expand the cabinet

Technical Parameters

Equipment Model

Serial No.

Working Temperature ℃

O.D. of Furnace Tube

φ mm

Furnace Tube Length

L mm

Heating Length

mm

Number of Temperature Zones

External Dimension

mm

(W×H×D)

Voltage

(V)

Power

(kW)

FGL(RTP)-25/11/1

RT~1000

25

1500

320

1

Touch Screen

1500*710*500

220

1.2

FGL(RTP)-50/11/1

RT~1000

50

1500

320

1

Touch Screen

1500*710*500

220



3.0

FGL(RTP)-60/11/1

RT~1000

60

1500

320

1

Touch Screen

1500*710*500

220

FGL(RTP)-80/11/1

RT~1000

80

1500

320

1

Touch Screen

1500*710*500

220


Notes

1. The dimensions of vacuum unit connections such as flange, furnace tube and flange bracket are not included

2. Other pipe diameters, number of temperature zones and length of heating zones can be customized according to customer's process requirements.


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Facerom was established in 2014, and the company is located in Hefei, one of the four major scientific and educational cities in China.

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 +86-17354020995
 
sales8@facerom.com
 No.3896 Tiandu Road, Economic Development Zone,Hefei,Anhui,China
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